Photolithography Machines

Nikon i8A Configuration

• Model of Nikon Tool - Nikon i8A
• Date of Manufacture - 01 August 1991
• Resolution - 0.5 micron
• Computer Type - Nest Computer
• Software - MCS2
• Reticle size - 5 inch
• Movable Microscopes - Yes {15/17.5/20 mm}
• Wafer size - 6 inch Flat
• Illuminator Type - 1500 W
• Reticle Libraries - 1
• Reticle Load/Unload Arms Open/Close to allow 20mm use - Yes
• PPD - No
• Bar code reader - Yes
• Wafer loader indexers - 2
• Wafer loader type - 1
• Wafer Loader Pre-alignment 2 - Yes
• FIA - Yes
• LSA - Yes
• Chip levelling - Yes
• Autococus - Single point
• ISS - Yes
• Focus Calibrate using ISS - Yes
• TTL reticle alignment - Yes
• Ceramic ring chuck with Prealignment 2 hammer - Yes
• Sec2 - Yes

Nikon i10C Configuration
SOLD

• Model of Nikon Tool - Nikon i10C
• Date of Manufacture - 01 November 1994
• Resolution - 0.4 micron
• Computer Type - PDP11/93 or Nest as optional
• Software - MCS2 Vers 2.4
• Reticle size - 6 inch
• Movable Microscopes - Fixed 22 mm
• Wafer Size - 8 inch notch
• Illuminator Type - 1750 W
• Reticle Libraries - 1
• PPD - No
• Bar Code Reader - Yes
• Wafer Loader Indexers - 2
• Wafer Loader Type - 1
• Wafer Loader Pre-alignment 2 - Yes
• FIA - Yes
• LSA - Yes
• Chip Levelling - YesAutofocus - 5 point
• ISS - Yes
• Focus Calibrate - Yes
• TTL Reticle Alignment - Yes
• Ceramic Ring Chuck - Yes
• Sec2 - Yes

Please note this machine has now been sold. If you are looking for something similar that you can't find on our website then please contact us today and a member of our team will be happy to help.