Nikon NSR-2005i8A

S/N: 803001

Date of Manufacture: 01 August 1991
Serial Number: 803001
Resolution: 0.5µm
Computer Type: PDP11
Rentical Size: 5 Inch
Field Sizes: 15 / 17.5 / 20mm
Wafer Size: 6 Inch Flat
Reticle Libraries: 1
Wafer Loader: Type 1
Wafer Loader Pre-alignment 2: Yes
Barcode Reader: Yes
Wafer Loader Indexers: 2
FIA: Yes
LSA: Yes
LIA: Yes
Autofocus: Single Point
Levelling: Yes
Chuck Type: Ceramic Ring Chuck
Water Stage: Ballscrew
MCS2 Version: 2.4B
PPD: No

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