Nikon NSR-2205i11D

S/N: 1105183

Date of Manufacture: 01 Sep 1995
Serial Number: 1105183
Resolution: 0.35µm
Computer Type: Nest-V
Rentical Size: 5 Inch
Field Sizes: 15 / 17.5 / 20mm
Wafer Size: 8 Inch Notch
Reticle Libraries: 1
Wafer Loader: Type 2
In-Line: Left
Wafer Loader Pre-alignment 2: Yes
Barcode Reader: Yes
Wafer Loader Indexers: 2
FIA: Yes
LSA: Yes
LIA: No
Autofocus: 5 Point
Levelling: Yes
Chuck Type: Ceramic Ring Chuck
Illuminator: Shrink 1
Illuminator Power: 1750 Watts
MCSV: 2.45P / OCSV: 2.42A / TOOL: 2.51A
PPD: No
FC2: Yes

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Nikon NSR-2205i11D