From our experience around 30% - 40% of all second-hand Nikon steppers are running with poor lens, This may be a result of the lens moving during transportation or drifting over a period.
Optimising your lens will not only improve the performance of your machine but will ultimately increase yield leading to increased revenue for your organisation. Lens optimisation can be achieved by adjusting the reticle table, lens coma, inclination and astigmatism.
This is a highly specialised job and NtekLitho are one of only a few worldwide companies that can provide this service to you.
Below you can see the before and after results of a lens optimisation project which was recently completed by NtekLitho at a customer site.
The results show the effects of lens coma shift on a Nikon i11D resulting in the customer experiencing depth of focus and resolution problems at field edges.
Swipe right to view after Lens Optimisation results >
Specialised lens adjustments resulted in an increased depth of focus and improved cross field critical dimensions (CD’s) within OEM spec, ultimately improving end of line yield for the customer.
Swipe left to view before Lens Optimisation status >